SRD Spin Rinse Dryer

For 2in, 4in, 6in and 8in wafer and substrate

Basic Function: DIW Rinse, Pipe Purge, Spin dry, Hot N2.

N2 heating temperature: 70°C.

Wafer Spin Rinse Dryer SRD Catalog

Spin Rinse Dryer For 4″ Wafer

Spin Rinse Dryer For 6″ Wafer

Spin Rinse Dryer For 8″ Wafer

Who We Are

Xwetool locates in Suzhou, China, who has a 30,000 square meters of facility area for tool and parts manufacturing and trade. We have got ISO9001, ISO14001, ISO45001 certificates. We have builded the class 1000 cleanroom for tool manufacturing and refurbshing.

With 11 years experience in semiconductor tool manufacturing, we have developed a series of spin rinse dryers for wafer drying. Our tool includes the vertical type and horizontal type. 

Through the years, with superior quality and excellent customer service, we have gained a good reputation from our clients. 

Features of Spin Rinse Dryer

Operation Light

With operation light when tool is running

Touch Panel

Touch panel for function setting

EMO Function

With EMO function for emergency shutdown

Start/Stop Switch

With start/stop switch for easy operation

Speed Counter & Rotor Stop Poster

With speed counter and rotor stop poster for precise control

Customized Rotor

Customized rotor to fit different setup

Spin Rinse Dryer Parts Supply

Pneumatic Valve

Brushless DC Motor

316L s/s Rotor

Rotor Stop Positioner (RSP)

SRD Seal, Rear Bowl

HV Generator

Motor Drive

Bowl Heater,T-stats 

U Type Heating Tube

Contact Us

Address

5th Floor, Building 2, No. 415 Changyang Street Suzhou Industrial Park, 215000, Suzhou, Jiangsu, China

Email

contact@xwetool.com

Phone

+86-13625293057

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