Xwetool

Spin Rinse Dryer

Efficient Batch Spray

- 316L-EP material for rotor and bowl
- N2 heating up to 70℃
- Max speed of spin up to 2,800rpm
- With N2 continuous purge

Wafer Handling Robot


Our semiconductor wafer handling robots features in high speed and ultra clean, making it an ideal option for advanced process.

TAZMO Robot & Pre-Aligner Catalog

Atmospheric robots

Vacuum Robots

Wafer Pre-aligners

Spin Rinse Dryer Catalog

Spin Rinse Dryer For 4″ Wafer

Spin Rinse Dryer For 6″ Wafer

Spin Rinse Dryer For 8″ Wafer

Who We Are

Xwetool (Xwesun) is located in Suzhou, China. Our main business includes semiconductor tool and parts technical support. Tools refurbishment include 12in CVD, ETCH retrofit, and supply spare parts. Agency is also a  part of our business.

Through the years, with  excellent customer service, we have gained a good reputation from our clients. 

Parts Catalog for Spin Rinse Dryer

Pneumatic Valve

Brushless DC Motor

316L s/s Rotor

Rotor Stop Positioner (RSP)

SRD Seal, Rear Bowl

HV Generator

Motor Drive

Bowl Heater,T-stats 

U Type Heating Tube