SRD Spin Rinse Dryer 4in
SRD Spin Rinse Dryer 4in
- Model Number: XWS-602D-4
- Max Speed of spin: Up to 2,800rpm
- With N2 continuous purge. N2 flow can be heated up to 70C
- With DIW Resistance meter
- With Anti-Static Device. With N2 Low flow interlock
Technical Data Sheet
| Model No. | XWS-602D-4 |
| Basic Function | DIW Rinse,Pipe Purge,Spin Dry,Hot N2. |
| Max Speed of spin | Up to 2,800rpm |
| N2 heating | 70℃ |
| With N2 continuous purge | Yes |
| DIW Resistance meter | Yes |
| Anti-Static Device/N2 Low flow interlock | Yes |
| EMO function | Yes |
| Capacity | 15 |
| Steps per recipe | 10 recipes |
| Auto-Clean Function | Yes |
| vibration | < 350um |
| Spin speed tolerance | < 10% |
| Rotor and bowl material | 316L-EP |
| Seal ring material | Viton |
| 腔体与轴密封类型 | Non-contact Air seal |
| Motor type | Brushless Motor. |
| N2 heater type | non-contact N2 heater |
| Filter precision | 0.003um |
| DI and N2 Valve material | PTFE |
| Size of tool | 500×695×1820mm |
| Weight of tool | 98kgs |