SRD Spin Rinse Dryer 8in
SRD Spin Rinse Dryer 8in, Wafer Drying Tool
- Model No. XWS-602D-8
- Rotor and bowl material: SUS-316L-EP
- With Viton door seal &real seal
- Use Air seal for motor and Bowl
- With Brushless Motor
- With non-contact N2 heater
- With 0.003um filter
- All PTFE DI and N2 Valve
Technical Data Sheet
| Model No. | XWS-602D-8 |
| Basic Function | DIW Rinse,Pipe Purge,Spin Dry,Hot N2. |
| Max Speed of spin | Up to 2,800rpm |
| N2 heating | 70℃ |
| With N2 continuous purge | Yes |
| DIW Resistance meter | Yes |
| Anti-Static Device/N2 Low flow interlock | Yes |
| EMO function | Yes |
| Capacity | 15 |
| Steps per recipe | 10 recipes |
| Auto-Clean Function | Yes |
| vibration | < 350um |
| Spin speed tolerance | < 10% |
| Rotor and bowl material | 316L-EP |
| Seal ring material | Viton |
| 腔体与轴密封类型 | Non-contact Air seal |
| Motor type | Brushless Motor. |
| N2 heater type | non-contact N2 heater |
| Filter precision | 0.003um |
| DI and N2 Valve material | PTFE |
| Size of tool | 500×695×1820mm |
| Weight of tool | 98kgs |
Features of Spin Rinse Dryer
Operation Light
With operation light when tool is running
Touch Panel
Touch panel for function setting
EMO Function
With EMO function for emergency shutdown
Start/Stop Switch
With start/stop switch for easy operation
Speed Counter & Rotor Stop Poster
With speed counter and rotor stop poster for precise control
Customized Rotor
Customized rotor to fit different setup